Product and services | ABCD-technology

SYBILLA Equipment for R&D

SYBILLA (stands for CBE-LA: Chemical Beam Epitaxy Laser-Assisted) equipment is a thin film growth equipment based on the CBE/CBVD technique (with the additional option of assisting the growth with perpendicular laser irradiation on the substrate).

We offer a wide range of different equipment models depending on the chosen substrate size and the number of chemical precursor lines (to deposit simultaneously from different compounds).

The equipment is designed such that highly uniform precursor flows (impinging rates) are achieved on the substrate even without substrate rotation or planetary motion (that are usually mandatory in other techniques) in a very compact growth chamber (despite the line-of-sight deposition technique).

In addition to uniform coatings, the equipment can be used in combinatorial mode (i.e highly controlled and customized chemical precursor flow gradients are achieved on the substrate according to highly accurate mathematical models) to rapidly investigate and optimize material properties and processes (precursor flow ratios determining the layer thickness, growth rates or chemical composition).

ABCD Technology staff and partners have been continuously developing the technology for more than 20 years, providing a user-friendly equipment with fast process optimization and merging all the advantages and facilities in a single reliable tool.

Several options are available such as additive growth (either with masks or with energetic beams, laser, electrons, etc.) and a wide range of in-situ monitoring/characterizing techniques for real-time measurements of growing thin films.

Several improvements for production are also available on demand.



Our main standard models are the ones listed below:

  • SYBILLA 200
    Proposed for 200 mm substrates with 3 precursor lines;
  • SYBILLA-450
    Proposed for 450 mm (18”) substrates with 3-5 precursor lines.

Other geometries on demand.

Several options are available, though we warmly recommend at least combinatorial and additive growth facilities as these options will make you stand out of the competition.

We can list the main ones:

  • Combinatorial facility
  • In-situ characterization techniques
  • Additive growth process
    • Laser-assisted (or other particle beam-assisted) deposition
    • Shadow or stencil mask assisted
  • Multi-chamber equipment and substrate cassettes
  • All the SYBILLA equipment can be used with substrate holder adapters enabling single or multiple smaller size substrates.
  • Automated process setting with optimized recipes.

R&D Services

Unlike most of our competitors, we also provide specific R&D support for you.

ABCD Technology has developed a strong partner network at R&D level to ensure awareness on current challenges and thin film bottlenecks and to provide continuous upgrades to its equipment.

We are strategically placed to anticipate the needs in a broad number of emerging markets thanks to a wide variety of top-level R&D programs.

ABCD Technology also provides, in collaboration with its network partners, material process development to match selected material properties or applications as well as technology intelligence services to challenge future emerging applications/devices.

Both services are available either as mandates or under collaboration within publicly funded projects.

In particular, we can:

  • Synthetize / investigate new precursors.
  • Optimize or develop totally new processes.
  • Optimize or develop totally new materials with tailored properties and functionalities.
  • Customize your Sybilla equipment with specific features.

Please contact us for further discussions.